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Study on RIE process for micro-contact-printing technology
Author(s): 
Pages: 401-404
Year: Issue:  3
Journal: Journal of Southwest University for Nationalities(Natrual Science Edition)

Keyword:  反应离子腐蚀腐蚀速度腐蚀选择比NF3;
Abstract: 选取4英寸的晶元切割制成相同的测试样品.试验研究不同的腐蚀气体,以及混合气体配比腐蚀效果,得到对本试验所生成结构有利的腐蚀介质.研究调节腐蚀过程中的气体流速,压强,高频功率等参数组合,取得比试验参考数据高腐蚀速度,良好的表面平整度,较高的腐蚀的选择比.器件结构的角度满足制作印制印章所需的脱模角度,实验研究讨论了不同工艺参数对反应离子腐蚀过程的作用的原理和影响,有助于分析和调节反应离子腐蚀的过程.
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