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jin nian shi jie ban dao ti she bei shi chang fen xi
Author(s): 
Pages: 31-34
Year: Issue:  3
Journal: 天津市科委

Keyword:  半导体设备市场投资;
Abstract: 介绍了1993~2000年世界半导体市场、世界半导体设备投资及世界半导体设备市场,后者包括光刻机、蚀刻设备、离子注入机、CMP设备和测试设备市场。
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